Semiconductor Manufacturing Equipment Diverse lineup of cleaning equipment, drying equipment, and functional components

Semiconductor Manufacturing Equipment Top > Products > EFEM AWL

EFEM AWL

EFEM AWL

Options of 1-4 port, FOUP transfer, and FOUP buffer for FOUP, SMIF, open cassette load board are available as options.

Features

Line-ups

  • AWL300, AWL200, AWL100, EFEM300

Wafer transfer loader AWL for stepper

  • Accessible to low floor

High-Throughput EFEM

  • Combining a high-Z stroke ⁄ high speed robot and a high speed linear track enabled high-throughput.

SECS ⁄ GEM available

  • A variety of automatic transfer controls and command controls. GUI allows monitoring operation.

Specifications

Types Factory Automation
Objected product for all
Correspondent wafer ⁄ work 50-300mm
Correspondent work thickness SEMI Standards for wafers
Clean level Not more than 10 particles in size of 0.2µm or more

Return to Page Top

After-Sales Service

Semiconductor Manufacturing Equipment

Products

Semiconductor Manufacturing Equipment