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Wafer Transfer

Wafer Transfer

Useful in diverse applications such as transfer between a transferring cassette and a cleaning cassette, transfer of cassettes between processes, and orientation flat alignment ⁄ V-notch alignment.

Features

Wide variations

  • Wafers available in various sizes and selectable between Manual and In-line types.
  • The specification can be selected depending on the application between 1 stage spec and 2 stage spec (table-sliding type).

High reliability with safe operation

  • Wafers can be transferred at low stress, resulting in prevention of wafer damage and chipping.

Variety of options

  • Face to Face, Orientation flat alignment, and V-notch alignment mechanism can be equipped as an option.

Specifications

Types Wafer Transfer
Objected product for all
Correspondent wafer ⁄ work ø4nch ~ ø8inch
Processing unit 25 pieces and 50 pieces
Option Face to Face, Orientation flat alignment, and V-notch alignment mechanism

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